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    Development of a Surface Micromachined On-Chip Flat Disk Micropump

    Development of a Surface Micromachined On-Chip Flat Disk Micropump by M. I. KILANI, A. T. AL-HALHOULI, P. C. GALAMBOS, Y. S. HAIK, A. AL-SALAYMEH, S. BÜTTGENBACH

    Published 2009-08-01
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