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    Impact of deposition parameters on the material quality of SPC poly-Si thin films using high-rate PECVD of a-Si:H

    Impact of deposition parameters on the material quality of SPC poly-Si thin films using high-rate PECVD of a-Si:H by Kumar Avishek, Widenborg Per Ingemar, Dalapati Goutam Kumar, Subramanian Gomathy Sandhya, Aberle Armin Gerhard

    Published 2015-01-01
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