Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering by Michał Mazur, Agata Obstarczyk, Witold Posadowski, Jarosław Domaradzki, Szymon Kiełczawa, Artur Wiatrowski, Damian Wojcieszak, Małgorzata Kalisz, Marcin Grobelny, Jan Szmidt

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