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    Atomic layer deposition of HfO2 on graphene from HfCl4 and H2O

    Atomic layer deposition of HfO2 on graphene from HfCl4 and H2O by Alles Harry, Aarik Jaan, Aidla Aleks, Fay Aurelien, Kozlova Jekaterina, Niilisk Ahti, Pärs Martti, Rähn Mihkel, Wiesner Maciej, Hakonen Pertti, Sammelselg Väino

    Published 2011-04-01
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