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    Fabrication of 5-20 nm thick β-W films

    Fabrication of 5-20 nm thick β-W films by Avyaya J. Narasimham, Manasa Medikonda, Akitomo Matsubayashi, Prasanna Khare, Hyuncher Chong, Richard J. Matyi, Alain Diebold, Vincent P. LaBella

    Published 2014-11-01
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