Ultra-Low Power CMOS Readout for Resonant MEMS Strain Sensors by Marco Crescentini, Cinzia Tamburini, Luca Belsito, Aldo Romani, Alberto Roncaglia, Marco Tartagni

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Model of Quality Factor for (111) 3C-SiC Double-Clamped Beams by Angela Garofalo, Annamaria Muoio, Sergio Sapienza, Matteo Ferri, Luca Belsito, Alberto Roncaglia, Francesco La Via

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Fabrication of Wafer-Level Vacuum-Packaged 3C-SiC Resonators with Q-Factor above 250,000 by Sergio Sapienza, Luca Belsito, Matteo Ferri, Ivan Elmi, Marcin Zielinski, Francesco La Via, Alberto Roncaglia

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Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on <111> and <100> Silicon by Sergio Sapienza, Matteo Ferri, Luca Belsito, Diego Marini, Marcin Zielinski, Francesco La Via, Alberto Roncaglia

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Emerging SiC Applications beyond Power Electronic Devices by Francesco La Via, Daniel Alquier, Filippo Giannazzo, Tsunenobu Kimoto, Philip Neudeck, Haiyan Ou, Alberto Roncaglia, Stephen E. Saddow, Salvatore Tudisco

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Dual-tube MEMS-based spectrophone for sub-ppb mid-IR photoacoustic gas detection by Stefano Dello Russo, Jacopo Pelini, Inaki Lopez Garcia, Maria Concetta Canino, Alberto Roncaglia, Pablo Cancio Pastor, Iacopo Galli, Paolo De Natale, Simone Borri, Mario Siciliani de Cumis

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New silicon-based micro-electro-mechanical systems for photo-acoustic trace-gas detection by Jacopo Pelini, Stefano Dello Russo, Inaki Lopez Garcia, Maria Concetta Canino, Alberto Roncaglia, Pablo Cancio Pastor, Iacopo Galli, Wei Ren, Paolo De Natale, Zhen Wang, Simone Borri, Mario Siciliani de Cumis

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