Showing 1 - 1 results of 1 for search 'Alexander Bobylev', query time: 0.02s Refine Results
  1. 1
    On Relationships between Plasma Chemistry and Surface Reaction Kinetics Providing the Etching of Silicon in CF<sub>4</sub>, CHF<sub>3</sub>, and C<sub>4</sub>F<sub>8</sub> Gases Mixed with Oxygen

    On Relationships between Plasma Chemistry and Surface Reaction Kinetics Providing the Etching of Silicon in CF<sub>4</sub>, CHF<sub>3</sub>, and C<sub>4</sub>F<sub>8</sub> Gases Mi... by Seung Yong Baek, Alexander Efremov, Alexander Bobylev, Gilyoung Choi, Kwang-Ho Kwon

    Published 2023-07-01
    Get full text
    Article

Search Tools: