ITO film stack engineering for low-loss silicon optical modulators by Evgeniy S. Lotkov, Aleksandr S. Baburin, Ilya A. Ryzhikov, Olga S. Sorokina, Anton I. Ivanov, Alexander V. Zverev, Vitaly V. Ryzhkov, Igor V. Bykov, Alexander V. Baryshev, Yuri V. Panfilov, Ilya A. Rodionov

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