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HIGH TEMPERATURE ANNEALING INFLUENCE ON STRUCTURE AND COMPOSITION OF a-Si/ZrO2 AND a-SiOx/ZrO2 MULTILAYERED NANOPERIODICAL STRUCTURES BY SYNCHROTRON XANES INVESTIGATIONS by Dmitry A. Koyuda, Vladimir A. Terekhov, Alexey V. Ershov, Elena V. Parinova, Alexandra K. Pisliaruk, Irina A. Karabanova, Sergey Yu. Turishchev
Published 2018-09-01Article -
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STRUCTURE AND COMPOSITION EVOLUTION a-Si/ZrO2 AND a-SiOx/ZrO2 MULTILAYERED NANOPERIODICAL STRUCTURES UNDER HIGH TEMPERATURE ANNEAL by Sergey Yu. Turishchev, Dmitry A. Koyuda, Alexey V. Ershov, Ulii A. Vainer, Tatiana V. Kulikova, Boris L. Agapov, Elena N. Zinchenko, Margarita V. Grechkina, Daria S. Usoltseva, Vladimir A. Terekhov
Published 2018-09-01Article