Tailoring of the Distribution of SERS-Active Silver Nanoparticles by Post-Deposition Low-Energy Ion Beam Irradiation by Oleg Streletskiy, Ilya Zavidovskiy, Dmitry Yakubovsky, Natalia Doroshina, Alexander Syuy, Yury Lebedinskij, Andrey Markeev, Aleksey Arsenin, Valentyn Volkov, Sergey Novikov

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