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Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas by Tai Nguyen, Noureddine Adjeroud, Mael Guennou, Jérôme Guillot, Yves Fleming, Anne-Marie Papon, Didier Arl, Kevin Menguelti, Raoul Joly, Narciso Gambacorti, Jérôme Polesel-Maris
Published 2020-06-01
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