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    Epitaxial growth of transition metal nitrides by reactive sputtering

    Epitaxial growth of transition metal nitrides by reactive sputtering by Florian Hörich, Christopher Lüttich, Jona Grümbel, Jürgen Bläsing, Martin Feneberg, Armin Dadgar, Rüdiger Goldhahn, André Strittmatter

    Published 2025-01-01
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  2. 2
    Thickness dependence of the mechanical properties of piezoelectric high-Qm nanomechanical resonators made from aluminium nitride

    Thickness dependence of the mechanical properties of piezoelectric high-Qm nanomechanical resonators made from aluminium nitride by Anastasiia Ciers, Alexander Jung, Joachim Ciers, Laurentius Radit Nindito, Hannes Pfeifer, Armin Dadgar, Jürgen Bläsing, André Strittmatter, Witlef Wieczorek

    Published 2024-01-01
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