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    Development of a Large-Range XY-Compliant Micropositioning Stage with Laser-Based Sensing and Active Disturbance Rejection Control

    Development of a Large-Range XY-Compliant Micropositioning Stage with Laser-Based Sensing and Active Disturbance Rejection Control by Ashenafi Abrham Kassa, Bijan Shirinzadeh, Kim Sang Tran, Kai Zhong Lai, Yanling Tian, Yanding Qin, Huaxian Wei

    Published 2024-01-01
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