Design and Process Analysis of a Split-Gate Trench Power MOSFET With Bottom-Trench High-<italic>k</italic> Pillar Superjunction for Enhanced Performance by Yunteng Jiang, Zhentao Xiao, Zonghao Zhang, Junchen Zhang, Chenxing Wang, Wenjun Li, Haimeng Huang, Aynul Islam, Hongqiang Yang

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