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Gas pressure measurement using micro-corona-discharging effect in surface acoustic wave resonators by Baofa Hu, Zhiwei Li, Yuanjie Wan, Mingpo Li, Haisheng San
Published 2021-06-01
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Fabrications of <i>L</i>-Band LiNbO<sub>3</sub>-Based SAW Resonators for Aerospace Applications by Baofa Hu, Shaoda Zhang, Hong Zhang, Wenlong Lv, Chunquan Zhang, Xueqin Lv, Haisheng San
Published 2019-05-01
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Wafer-Level Self-Packaging Design and Fabrication of MEMS Capacitive Pressure Sensors by Yuanjie Wan, Zhiwei Li, Zile Huang, Baofa Hu, Wenlong Lv, Chunquan Zhang, Haisheng San, Shaoda Zhang
Published 2022-05-01
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