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  1. 1
    Kinetic analysis of the chemical processes in the decomposition of gaseous dielectrics by a non-equilibrium plasma - part 1: CF4 and CF4/O2

    Kinetic analysis of the chemical processes in the decomposition of gaseous dielectrics by a non-equilibrium plasma - part 1: CF4 and CF4/O2 by Bauerfeldt Glauco F., Arbilla Graciela

    Published 2000-01-01
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    Article
  2. 2
    Kinetic analysis of the chemical processes in the decomposition of gaseous dielectrics by a non-equilibrium plasma - part 2: SF6 and SF6/O2

    Kinetic analysis of the chemical processes in the decomposition of gaseous dielectrics by a non-equilibrium plasma - part 2: SF6 and SF6/O2 by Bauerfeldt Glauco F., Arbilla Graciela

    Published 2000-01-01
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    Article

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