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    Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces

    Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces by Gour Jeetendra, Beer Sebastian, Paul Pallabi, Alberucci Alessandro, Steinert Michael, Szeghalmi Adriana, Siefke Thomas, Peschel Ulf, Nolte Stefan, Zeitner Uwe Detlef

    Published 2024-08-01
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