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    Area-Selective Atomic Layer Deposition of ZnO on Si\SiO<sub>2</sub> Modified with Tris(dimethylamino)methylsilane

    Area-Selective Atomic Layer Deposition of ZnO on Si\SiO<sub>2</sub> Modified with Tris(dimethylamino)methylsilane by Behnam Moeini, Tahereh G. Avval, Hidde H. Brongersma, Stanislav Průša, Pavel Bábík, Elena Vaníčková, Brian R. Strohmeier, David S. Bell, Dennis Eggett, Steven M. George, Matthew R. Linford

    Published 2023-06-01
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