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    Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning

    Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning by Yijie Liu, Xuexuan Li, Ben Pei, Lin Ge, Zhuo Xiong, Zhen Zhang

    Published 2023-10-01
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