Towards Robust Thermal MEMS: Demonstration of a Novel Approach for Solid Thermal Isolation by Substrate-Level Integrated Porous Microstructures by Ole Behrmann, Thomas Lisec, Björn Gojdka

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PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures by Thomas Lisec, Ole Behrmann, Björn Gojdka

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Broadband Zero-Power Wakeup MEMS Device for Energy-Efficient Sensor Nodes by Minhaz Ahmed, Torben Dankwort, Sven Grünzig, Volker Lange, Björn Gojdka

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Investigation of Wafer-Level Fabricated Permanent Micromagnets for MEMS by Mani Teja Bodduluri, Björn Gojdka, Niklas Wolff, Lorenz Kienle, Thomas Lisec, Fabian Lofink

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Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies by Mani Teja Bodduluri, Torben Dankwort, Thomas Lisec, Sven Grünzig, Anmol Khare, Minhaz Ahmed, Björn Gojdka

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Demonstration of Fully Integrable Long-Range Microposition Detection with Wafer-Level Embedded Micromagnets by Björn Gojdka, Daniel Cichon, Yannik Lembrecht, Mani Teja Bodduluri, Thomas Lisec, Markus Stahl-Offergeld, Hans-Peter Hohe, Florian Niekiel

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