Characterisation of nanowire structures with scatterometric and ellipsometric measurements by Grundmann Jana, Käseberg Tim, Bodermann Bernd

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Nanoform evaluation approach using Mueller matrix microscopy and machine learning concepts by Käseberg Tim, Grundmann Jana, Kroker Stefanie, Bodermann Bernd

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Imaging Mueller matrix ellipsometry setup for optical nanoform metrology by Käseberg Tim, Grundmann Jana, Dickmann Johannes, Kroker Stefanie, Bodermann Bernd

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Alignment autocollimator-based microscope adjustment and its quality assessment by Krüger Jan, Bergmann Detlef, Sturm Matthias, Häßler-Grohne Wolfgang, Köning Rainer, Bodermann Bernd

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Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy by Manley Phillip, Krüger Jan, Zschiedrich Lin, Hammerschmidt Martin, Bodermann Bernd, Köning Rainer, Schneider Philipp-Immanuel

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