Chemical and structural investigation of the role of both Mn and Mn oxide in the formation of manganese silicate barrier layers on SiO(2) by Casey, P, Bogan, J, Lozano, J, Nellist, P, Hughes, G

Chemical and structural investigations of the incorporation of metal manganese into ruthenium thin films for use as copper diffusion barrier layers by McCoy, A, Casey, P, Bogan, J, Lozano, J, Nellist, P, Hughes, G

Chemical and structural investigations of the interactions of Cu with MnSiO3 diffusion barrier layers by Casey, P, Bogan, J, McCoy, A, Lozano, J, Nellist, P, Hughes, G

Scanning transmission electron microscopy investigations of self-forming diffusion barrier formation in Cu(Mn) alloys on SiO2 by Lozano, J, Bogan, J, Casey, P, McCoy, A, Hughes, G, Nellist, P

Interdiffusion and barrier layer formation in thermally evaporated Mn/Cu heterostructures on SiO substrates by Lozano, J, Bogan, J, Brennan, B, Hughes, G, Lozano-Perez, S, Nellist, P, Wang, Y

Interdiffusion and barrier layer formation in thermally evaporated Mn/Cu heterostructures on SiO2 substrates by Lozano, J, Lozano-Perez, S, Bogan, J, Wang, Y, Brennan, B, Nellist, P, Hughes, G

(S)TEM analysis of the interdiffusion and barrier layer formation in Mn/Cu heterostructures on SiO2 for interconnect technologies by Lozano, J, Lozano-Perez, S, Bogan, J, Wang, Y, Brennan, B, Nellist, P, Hughes, G