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On the Quenching of Electron Temperature in Inductively Coupled Plasma by Inho Seong, Si-jun Kim, Youngseok Lee, Chulhee Cho, Wonnyoung Jeong, Yebin You, Minsu Choi, Byeongyeop Choi, Shinjae You
Published 2023-04-01
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Characterization of SiO<sub>2</sub> Plasma Etching with Perfluorocarbon (C<sub>4</sub>F<sub>8</sub> and C<sub>6</sub>F<sub>6</sub>) and Hydrofluorocarbon (CHF<sub>3</sub> and C<sub... by Minsu Choi, Youngseok Lee, Yebin You, Chulhee Cho, Wonnyoung Jeong, Inho Seong, Byeongyeop Choi, Sijun Kim, Youbin Seol, Shinjae You, Geun Young Yeom
Published 2023-08-01
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