Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing by G. Stocker, C. Consani, P. Thakkar, C. Fleury, A. Tortschanoff, K.-F. Ourak, G. Pühringer, R. Jannesari, P. Saeidi, E. Aschauer, U. Bartl, C. Kovatsch, T. Grille, B. Jakoby

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