Showing 1 - 2 results of 2 for search 'Changbong Yeon', query time: 0.02s Refine Results
  1. 1
    Enhancement of Conformality of Silicon Nitride Thin Films by ABC‐Type Atomic Layer Deposition

    Enhancement of Conformality of Silicon Nitride Thin Films by ABC‐Type Atomic Layer Deposition by Jiwon Kim, Changbong Yeon, Deok‐Hyun Cho, Jaesun Jung, Bonggeun Shong

    Published 2024-03-01
    Get full text
    Article
  2. 2
    Tertiary alkyl halides as growth activator and inhibitor for novel atomic layer deposition of low resistive titanium nitride

    Tertiary alkyl halides as growth activator and inhibitor for novel atomic layer deposition of low resistive titanium nitride by Changbong Yeon, Jaesun Jung, Hyeran Byun, Kok Chew Tan, Taeho Song, Sojung kim, Jin Hee Kim, Seok Jong Lee, Young-Soo Park

    Published 2021-01-01
    Get full text
    Article

Search Tools: