Showing 1 - 3 results of 3 for search 'Chao-Chang A. Chen', query time: 0.03s Refine Results
  1. 1
    Contamination reduction for 150 mm SiC substrates by integrating CMP and Post-CMP cleaning

    Contamination reduction for 150 mm SiC substrates by integrating CMP and Post-CMP cleaning by Chi-Hsiang Hsieh, Ming-Hsun Lee, Chao-Chang A Chen, Chang-Ching Tu, Hao-Chung Kuo

    Published 2023-01-01
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    Article
  2. 2
    Dynamic Pad Surface Metrology Monitoring by Swing-Arm Chromatic Confocal System

    Dynamic Pad Surface Metrology Monitoring by Swing-Arm Chromatic Confocal System by Chao-Chang A. Chen, Jen-Chieh Li, Wei-Cheng Liao, Yong-Jie Ciou, Chun-Chen Chen

    Published 2020-12-01
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    Article
  3. 3
    Recent Advances In Silicon Carbide Chemical Mechanical Polishing Technologies

    Recent Advances In Silicon Carbide Chemical Mechanical Polishing Technologies by Chi-Hsiang Hsieh, Che-Yuan Chang, Yi-Kai Hsiao, Chao-Chang A. Chen, Chang-Ching Tu, Hao-Chung Kuo

    Published 2022-10-01
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