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Metrology of very thin silicon epitaxial films by Cherkassky, Alexander (Alexander Peter), 1963-
Published 2009
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Cognitive Information Processing by Troxel, Donald E., Heytens, Michael L., Jayavant, Rajeev, Kommrusch, Steve, Monta, Peter, Kaliszewski, Joseph V., Lynn, Charles W., Picard, Leonard, Ono, Joanne, Tsakiris, Todd, Vinciguerra, Ralph, Cherkassky, Alexander
Published 2010
Technical Report