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    Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment

    Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment by Chyuan-Haur Kao, Chia Lung Chang, Wei Ming Su, Yu Tzu Chen, Chien Cheng Lu, Yu Shan Lee, Chen Hao Hong, Chan-Yu Lin, Hsiang Chen

    Published 2017-08-01
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