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    Fabrication of AlGaN High Frequency Bulk Acoustic Resonator by Reactive RF Magnetron Co-sputtering System

    Fabrication of AlGaN High Frequency Bulk Acoustic Resonator by Reactive RF Magnetron Co-sputtering System by Yu-Chen Chang, Ying-Chung Chen, Chien-Chuan Cheng

    Published 2021-12-01
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