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  1. 1
    Mechanical Properties and Oxidation Behavior of TaWSiN Films

    Mechanical Properties and Oxidation Behavior of TaWSiN Films by Chin-Han Tzeng, Li-Chun Chang, Yung-I Chen

    Published 2022-11-01
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    Article
  2. 2
    Effects of nitrogen flow ratio on the structural, mechanical, and anticorrosive properties of co-sputtered (NbTaMoW)Nx films

    Effects of nitrogen flow ratio on the structural, mechanical, and anticorrosive properties of co-sputtered (NbTaMoW)Nx films by Jyh-Wei Lee, Chun-Yen Chen, Yi-Jyun Chen, Chin-Han Tzeng, Yung-I Chen

    Published 2022-11-01
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    Article

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