Enhancing the Light-Extraction Efficiency of AlGaN-Based Deep-Ultraviolet Light-Emitting Diodes by Optimizing the Diameter and Tilt of the Aluminum Sidewall by Yung-Min Pai, Chih-Hao Lin, Chun-Fu Lee, Chun-Peng Lin, Cheng-Huan Chen, Hao-Chung Kuo, Zhi-Ting Ye

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