Fabrication of the 3 Dimension Resist Microstructure Using X-Ray Diffraction by Kyo TANABIKI, Yoichi FUNABIKI, Daiji NODA, Tadashi HATTORI

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Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators by Masaru SETOMOTO, Yoshifumi MATSUMOTO, Shuhei YAMASHITA, Daiji NODA, Tadashi HATTORI

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Formation of High Aspect Ratio Microcoil Using Dipping Method by Daiji NODA, Shuhei YAMASHITA, Yoshifumi MATSUMOTO, Masaru SETOMOTO, Tadashi HATTORI

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Surface Modification and Direct Bonding of Different Materials Irradiated H2O Ion by Kazufumi NISHIMOTO, Naoya ISHIZAWA, Hiroyasu UEDA, Daiji NODA, Tadashi HATTORI

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Fabrication of the X-Ray Mask using the Silicon Dry Etching by Hiroshi TSUJII, Kazuma SHIMADA, Makoto TANAKA, Wataru YASHIRO, Daiji NODA, Tadashi HATTORI

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