Showing 1 - 3 results of 3 for search 'Damien Maillard', query time: 0.02s Refine Results
  1. 1
    Electron-beam lithography on M108Y and M35G chemically amplified DUV photoresists

    Electron-beam lithography on M108Y and M35G chemically amplified DUV photoresists by Damien Maillard, Zdenek Benes, Niccolò Piacentini, Luis Guillermo Villanueva

    Published 2021-11-01
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  2. 2
    Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity

    Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity by Damien Maillard, Annalisa De Pastina, Amir Musa Abazari, Luis Guillermo Villanueva

    Published 2021-04-01
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  3. 3
    Micro 3D printing of a functional MEMS accelerometer

    Micro 3D printing of a functional MEMS accelerometer by Simone Pagliano, David E. Marschner, Damien Maillard, Nils Ehrmann, Göran Stemme, Stefan Braun, Luis Guillermo Villanueva, Frank Niklaus

    Published 2022-09-01
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