Fabrication of 3-mu m diameter pin hole array (PHA) on thick W substrates. by Levato, T, Pathak, N, Cecchetti, C, Ciricosta, O, Koester, P, Labate, L, Giulietti, A, Giulietti, D, De Angelis, F, Di Fabrizio, E, Delogu, P, Gizzi, L