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    Enhancement of Conformality of Silicon Nitride Thin Films by ABC‐Type Atomic Layer Deposition

    Enhancement of Conformality of Silicon Nitride Thin Films by ABC‐Type Atomic Layer Deposition by Jiwon Kim, Changbong Yeon, Deok‐Hyun Cho, Jaesun Jung, Bonggeun Shong

    Published 2024-03-01
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