Integrating Philips' extreme UV source in the alpha-tools by Pankert, J, Apetz, R, Bergmann, K, Derra, G, Janssen, M, Jonkers, J, Klein, J, Krucken, T, List, A, Loeken, M, Metzmacher, C, Neff, W, Probst, S, Prummer, R, Rosier, O, Seiwert, S, Siemons, G, Vaudrevange, D, Wagemann, D, Weber, A, Zink, P, Zitzen, O

EUV sources for the alpha-tools - art. no. 61510Q by Apetz, R, Bergmann, K, Damen, M, Derra, G, Franken, O, Janssen, M, Jonkers, J, Klein, J, Kraus, H, Kruecken, T, List, A, Loeken, M, Mader, A, Metzmacher, C, Neff, W, Probst, S, Pruemmer, R, Rosier, O, Schwabe, S, Seiwert, S, Siemons, G, Vaudrevange, D, Wagemann, D, Weber, A, Zink, P