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Cathodic Vacuum ARC Multilayer Coatings (TiZrSiY)N/NbN: Structure and Properties Depending on The Deposition Interval of Alternate Layers by Vyacheslav M. Beresnev, Serhii V. Lytovchenko, Mykola O. Azarenkov, Olga V. Maksakova, Denis V. Horokh, Bohdan O. Mazilin, Diana Kaynts, Irina V. Doshchechkina, Оleg V. Gluhov
Published 2023-12-01
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