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The Effect of Post Deposition Treatment on Properties of ALD Al-Doped ZnO Films by Dimitrina Petrova, Blagovest Napoleonov, Chau Nguyen Hong Minh, Vera Marinova, Yu-Pin Lan, Ivalina Avramova, Stefan Petrov, Blagoy Blagoev, Vladimira Videva, Velichka Strijkova, Ivan Kostadinov, Shiuan-Huei Lin, Dimitre Dimitrov
Published 2023-02-01
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