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Lead-Free LiNbO<sub>3</sub> Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester by Gabriel Barrientos, Giacomo Clementi, Carlo Trigona, Merieme Ouhabaz, Ludovic Gauthier-Manuel, Djaffar Belharet, Samuel Margueron, Ausrine Bartasyte, Graziella Malandrino, Salvatore Baglio
Published 2022-01-01
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Collective fabrication of guided longitudinal SAW resonator without Bragg grating mirror by Thomas Baron, Stefania Oliveri, Thomas Richard, Valerie Soumann, Djaffar Belharet, Laurent Robert, Marina Raschetti, Roland Salut, Emilie Courjon, Thierry Laroche, Florent Bernard, Alexandre Clairet, Sylvain Ballandras
Published 2023-06-01
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