Data on nitridation effect of AlTiTaZrHf(-N) high entropy films by X-ray photoelectron spectroscopy by Mohamed El Garah, Djallel Eddine Touaibia, Sofiane Achache, Alexandre Michau, Elizaveta Sviridova, Pavel S. Postnikov, Mohamed M. Chehimi, Frederic Schuster, Frederic Sanchette

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