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    Studies on Oxygen Permeation Resistance of SiCN Thin Film and RRAM Applications

    Studies on Oxygen Permeation Resistance of SiCN Thin Film and RRAM Applications by Myeong-Ho Song, Woon-San Ko, Geun-Ho Kim, Dong-Hyeuk Choi, Ga-Won Lee

    Published 2022-12-01
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