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Films Deposited from Reactive Sputtering of Aluminum Acetylacetonate Under Low Energy Ion Bombardment by Felipe Augusto Darriba Battaglin, Eduardo Silva Prado, Luciano Caseli, Tiago Fiorini da Silva, Manfredo Harri Tabacniks, Nilson Cristino da Cruz, Elidiane Cipriano Rangel
Published 2017-04-01
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