Showing 1 - 4 results of 4 for search 'Eiji Higurashi', query time: 0.04s
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Room temperature wafer bonding through conversion of polysilazane into $$\hbox {SiO}_{2}$$ SiO 2 by Kai Takeuchi, Tadatomo Suga, Eiji Higurashi
Published 2024-01-01
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An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring by Lan Zhang, Jian Lu, Hideki Takagi, Sohei Matsumoto, Eiji Higurashi
Published 2022-10-01
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Effect of Au Film Thickness and Surface Roughness on Room-Temperature Wafer Bonding and Wafer-Scale Vacuum Sealing by Au-Au Surface Activated Bonding by Michitaka Yamamoto, Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Tadatomo Suga, Seiichi Takamatsu, Toshihiro Itoh, Eiji Higurashi
Published 2020-04-01
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