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<i>C</i>-Axis Textured, 2–3 μm Thick Al<sub>0.75</sub>Sc<sub>0.25</sub>N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications by Asaf Cohen, Hagai Cohen, Sidney R. Cohen, Sergey Khodorov, Yishay Feldman, Anna Kossoy, Ifat Kaplan-Ashiri, Anatoly Frenkel, Ellen Wachtel, Igor Lubomirsky, David Ehre
Published 2022-09-01
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