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In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection by Andi Setiono, Maik Bertke, Wilson Ombati Nyang’au, Jiushuai Xu, Michael Fahrbach, Ina Kirsch, Erik Uhde, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Hutomo Suryo Wasisto, Erwin Peiner
Published 2020-01-01
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