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  1. 1
    Hybrid optical measurement technique for detection of defects in epitaxially grown 4H-SiC layers

    Hybrid optical measurement technique for detection of defects in epitaxially grown 4H-SiC layers by Ermilova Elena, Weise Matthias, Hertwig Andreas

    Published 2022-01-01
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    Article
  2. 2
    Application of imaging ellipsometry and white light interference microscopy for detection of defects in epitaxially grown 4H–SiC layers

    Application of imaging ellipsometry and white light interference microscopy for detection of defects in epitaxially grown 4H–SiC layers by Ermilova Elena, Weise Matthias, Hertwig Andreas

    Published 2023-01-01
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    Article

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