Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization by Svetlana V. Belaya, Eugene A. Maksimovsky, Vladimir R. Shayapov, Aleksandra A. Shapovalova, Alexey N. Kolodin, Andrey A. Saraev, Igor P. Asanov, Maxim N. Khomyakov, Irina V. Yushina, Aleksandr G. Plekhanov, Veronica S. Sulyaeva, Marina L. Kosinova

Get full text