Atomic Layer Deposition of Ru Thin Film Using a Newly Synthesized Precursor with Open‐Coordinated Ligands by Seung Hoon Oh, Jeong Min Hwang, Hyeonbin Park, Dongseong Park, Young Eun Song, Eun Chong Ko, Tae Joo Park, Taeyong Eom, Taek‐Mo Chung

Get full text