Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers by Bruno César Noronha Marques de Castilho, Felipe de Sousa Mazuco, Alisson Mendes Rodrigues, Pedro Renato Tavares Avila, Raira Chefer Apolinario, Philipp Daum, Fabiana Pereira da Costa, Romualdo Rodrigues Menezes, Gelmires de Araújo Neves, Christian Greiner, Haroldo Cavalcanti Pinto

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