Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing by Jules Tillement, Cyril Cervera, Jacques Baylet, Christophe Jany, François Nardelli, Thomas Di Rito, Sylvain Georges, Gabriel Mugny, Olivier Saxod, Olivier Gravrand, Thierry Baron, François Roy, Frédéric Boeuf

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